Section: 12 | Electron Inelastic Mean Free Paths |

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The table 'TABLE 1. Electron Inelastic Mean Free Paths of Elemental Solids in Å (10^–10 m) at Various Electron Energies' has one or more different columns to those in the book version.
The table 'TABLE 2. Electron Inelastic Mean Free Paths in Å (10^–10 m) of Other Materials at Various Electron Energies' has one or more different columns to those in the book version.

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ELECTRON INELASTIC MEAN FREE PATHS

Cedric J. Powell

The inelastic mean free path (IMFP) of electrons impinging on a solid surface is defined as the average of distances, measured along the trajectories, that electrons with a given energy travel between inelastic collisions in the substance. It is an important parameter in analyzing results from surface characterization techniques such as Auger electron spectroscopy, x-ray photoelectron spectroscopy, low-energy electron diffraction, and others. IMFPs can be measured by the elastic-peak electron spectroscopy technique and other methods, and they can be calculated from optical data. A detailed analysis of the experimental and theoretical considerations in obtaining reliable IMFP values can be found in Refs. 4 and 5.

Table 1 below gives recommended IMFP values for 41 elemental solids in the energy range 50 eV to 30000 eV. All values in Table 1 are taken from Ref. 1. Table 2 gives IMFP values for several inorganic and organic compounds in the range 50 eV to 2000 eV.

In Table 1 elements are listed in alphabetical order by symbol. The listing in Table 2 is by name, with inorganic materials preceding the organic materials. IMFP values are given in Ångström units (1 Å = 10^–10 m).

References

Tanuma, S., Powell, C. J., and Penn, D. R., Surf. Interface Anal. (in press); doi 10.1002/sia.3522.
Tanuma, S., Powell, C. J., and Penn, D. R., Surf. Interface Anal. 17, 927, 1991. [https://doi.org/10.1002/sia.740171305]
Tanuma, S., Powell, C. J., and Penn, D. R., Surf. Interface Anal. 21, 165, 1994. [https://doi.org/10.1002/sia.740210302]
Powell, C. J., and Jablonski, A., J. Phys. Chem. Ref. Data 28, 19, 1999. [https://doi.org/10.1063/1.556035]
Powell, C. J., and Jablonski, A., Nucl. Instr. Meth. Phys. Res. A 601, 54, 2009. [https://doi.org/10.1016/j.nima.2008.12.103]

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TABLE 1. Electron Inelastic Mean Free Paths of Elemental Solids in Å (10^–10 m) at Various Electron Energies

Formula	Element	IMFP(50 eV)/Å	IMFP(100 eV)/Å	IMFP(250 eV)/Å	IMFP(500 eV)/Å	IMFP(750 eV)/Å	IMFP(1000 eV)/Å	IMFP(1250 eV)/Å	IMFP(1500 eV)/Å	IMFP(1750 eV)/Å	IMFP(2000 eV)/Å	IMFP(3000 eV)/Å	IMFP(5000 eV)/Å	IMFP(10000 eV)/Å	IMFP(15000 eV)/Å	IMFP(20000 eV)/Å	IMPF(30000 eV)/Å	Ref.
Continued on next page...
Ag	Silver	6.1	4.9	5.9	8.7	11.6	14.2	16.8	19.2	21.6	24.0	33.0	50.0	89.3	126.2	161.6	229.7	1
Al	Aluminum	3.5	4.6	7.9	12.7	17.1	21.3	25.4	29.4	33.3	37.2	52.0	79.9	144.8	206.0	265.1	378.8	1
Au	Gold	5.1	4.3	5.6	8.4	11.0	13.5	15.9	18.2	20.5	22.7	31.1	47.1	83.9	118.4	151.5	215.1	1
Be	Beryllium	3.5	4.3	7.2	11.7	15.9	19.9	23.8	27.6	31.2	34.9	48.8	75.3	136.7	194.7	250.6	358.4	1
Bi	Bismuth	4.9	5.5	8.0	12.3	16.4	20.2	23.9	27.5	31.0	34.4	47.5	72.1	129.3	182.8	234.4	333.6	1
C^a	Carbon (graphite)	4.8	4.4	6.8	10.8	14.6	18.2	21.7	25.0	28.3	31.6	44.0	67.6	122.2	173.7	223.3	318.9	1
C^b	Carbon (diamond)	6.9	4.7	6.4	9.9	13.2	16.4	19.4	22.4	25.3	28.1	39.0	59.6	107.3	152.1	195.3	278.4	1
C^c	Carbon black	5.8	6.3	10.0	16.0	21.7	27.0	32.1	37.1	42.0	46.8	65.4	100.4	181.9	258.6	332.7	475.4	1
Co	Cobalt	5.1	4.6	6.1	9.0	11.8	14.5	17.2	19.8	22.3	24.8	34.2	51.9	92.9	131.4	168.3	239.5	1
Cr	Chromium	4.5	4.4	6.4	9.9	13.2	16.3	19.4	22.3	25.2	28.0	38.8	59.2	106.4	150.7	193.4	275.6	1
Cs	Cesium	6.3	9.3	17.4	29.3	40.3	50.8	61.0	71.0	80.7	90.2	126.8	196.1	357.6	510.4	657.9	942.8	1
Cu	Copper	5.0	5.0	7.0	10.4	13.6	16.7	19.6	22.6	25.4	28.2	39.0	59.2	105.7	149.5	191.5	272.4	1
Dy	Dysprosium	4.5	4.6	6.8	10.6	14.1	17.5	20.8	23.9	27.0	30.0	41.7	63.5	114.0	161.5	207.2	295.1	1
Fe	Iron	4.3	4.6	6.7	10.2	13.5	16.7	19.7	22.7	25.7	28.5	39.5	60.1	107.8	152.7	195.8	278.8	1
Gd	Gadolinium	4.1	4.6	7.4	11.8	15.7	19.5	23.2	26.8	30.3	33.7	46.9	71.6	128.8	182.6	234.4	334.1	1
Ge	Germanium	4.0	5.0	8.2	12.9	17.2	21.2	25.2	29.0	32.8	36.5	50.7	77.5	139.5	197.9	254.2	362.5	1
Hf	Hafnium	5.5	5.5	7.5	11.3	14.9	18.2	21.5	24.6	27.7	30.7	42.3	64.2	114.4	161.5	206.7	293.8	1
In	Indium	4.7	5.4	8.0	12.3	16.5	20.6	24.4	28.1	31.8	35.3	48.9	74.5	133.8	189.5	243.1	346.3	1
Ir	Iridium	5.3	4.2	5.4	8.0	10.4	12.7	15.0	17.1	19.2	21.2	29.1	43.9	78.1	110.1	140.8	199.7	1

^aGraphite
^bDiamond
^cGlassy

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ELECTRON INELASTIC MEAN FREE PATHS

References